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journal of vacuum science & technology b: microelectronics and nanometer structures
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Publications Per Year
Recent Articles (4 total)
1994
Vol. 12
, No. 4
, pp. 2684-
275 views
DOI
1998
Vol. 16
, No. 2
, pp. 811-
206 views
DOI
1998
Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature
Vol. 16
, No. 2
, pp. 773-
201 views
DOI
1998
Vol. 16
, No. 1
, pp. 238-
178 views
DOI