Fabrication and characterization of silicon field emitter arrays by spin-on-glass etch-back process

Clicks: 204
ID: 113326
1998
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Ranked #4 of 4 articles by views in journal of vacuum science & technology b: microelectronics and nanometer structures

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Reference Key
lee1998journalfabrication1 Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Jin Ho Lee;Jin Ho Lee;
Journal journal of vacuum science & technology b: microelectronics and nanometer structures
Year 1998
DOI
10.1116/1.589786
URL
https://sciprofiles.com/publication/view/2520f1d0820906d9cdd9e7a65e4b588d
Keywords
emitter arrays silicon field field emitter glass etch fabrication and characterization

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