Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature
Clicks: 162
ID: 115151
1998
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| Reference Key |
lee1998journalpolycrystalline
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| Authors | Jin Ho Lee;Jin Ho Lee; |
| Journal | journal of vacuum science & technology b: microelectronics and nanometer structures |
| Year | 1998 |
| DOI |
10.1116/1.589902
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