Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process

Clicks: 168
ID: 111967
1998
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Authors Jin Ho Lee;Jin Ho Lee;
Journal journal of vacuum science & technology b: microelectronics and nanometer structures
Year 1998
DOI
10.1116/1.589911
URL
https://sciprofiles.com/publication/view/21ec366939501abe36fa741aaa1e36fa
Keywords
polishing process focusing electrode emitter arrays silicon field mechanical polishing field emitter chemical mechanical

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