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journal of micromechanics and microengineering

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Short Name journal of micromechanics and microengineering
Abbreviated Name journal of micromechanics and microengineering
ISSN 0960-1317
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Publications Per Year

Recent Articles (3 total)

2015
MEMS probes for on-wafer RF microwave characterization of future microelectronics: Design, fabrication and characterization
Marzouk, J.
Vol. 25 , pp. 0-0
211 views DOI
2019
Numerical and experimental investigations into microchannel formation in glass substrate using electrochemical discharge machining
Mishra, D.
Vol. 29 , pp. 0-0
184 views DOI
2002
Bonding of silicon scanning mirror having vertical comb fingers
Jin-Ho Lee,Young-Chul Ko,Byoung-So Choi,Jong-Min Kim,Duk Young Jeon;Jin-Ho Lee;Young-Chul Ko;Byoung-So Choi;Jong-Min Kim;Duk Young Jeon;
Vol. 12 , No. 5 , pp. 644-649
136 views DOI
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