Bonding of silicon scanning mirror having vertical comb fingers

Clicks: 228
ID: 273435
2002
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Abstract
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Reference Key
jeon2002journalbonding Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Jin-Ho Lee,Young-Chul Ko,Byoung-So Choi,Jong-Min Kim,Duk Young Jeon;Jin-Ho Lee;Young-Chul Ko;Byoung-So Choi;Jong-Min Kim;Duk Young Jeon;
Journal journal of micromechanics and microengineering
Year 2002
DOI
10.1088/0960-1317/12/5/320
URL
https://sciprofiles.com/publication/view/4403c96b9b8d2ca23c1cee691ff092f8
Keywords
bonding vertical comb silicon scanning scanning mirror comb fingers

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