MEMS probes for on-wafer RF microwave characterization of future microelectronics: Design, fabrication and characterization

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2015
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marzouk2015memsjournal Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Marzouk, J.
Journal journal of micromechanics and microengineering
Year 2015
DOI
10.1088/0960-1317/25/7/075024
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