mems sensorstechnologyelectrical engineering

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optimization of the gaas-on-si substrate for microelectromechanical systems (mems) sensor application

;Ying Yu;Mifeng Li;Jifang He;Wendong Zhang;Jun Tang;Jun Liu;Zhichuan Niu;Chenyang Xue;Hao Guo;Haiqia...

2012 Nature Materials DOI: 10.3390/ma5122917 227 views

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