planar magnetron

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M.L. Escrivão,A.M.C. Moutinho,Manuel J.P. Maneira;M.L. Escrivão;A.M.C. Moutinho;Manuel J.P. Maneira;

1993 journal of nuclear materials DOI: 10.1016/0022-3115(93... 185 views

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M. L. Escrivão,A. M. C. Moutinho,M. J. P. Maneira;M. L. Escrivão;A. M. C. Moutinho;M. J. P. Maneir...

1994 journal of vacuum science & technology a DOI: 10.1116/1.578813 162 views

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