magnetron glow

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Planar magnetron glow discharge on copper — The Thornton relation revisited
M.L. Escrivão,A.M.C. Moutinho,Manuel J.P. Maneira;M.L. Escrivão;A.M.C. Moutinho;Manuel J.P. Maneira;
1993 journal of nuclear materials DOI: 10.1016/0022-3115(93... 185 views

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copper planar magnetron thornton relation relation revisited glow discharge