Planar magnetron glow discharge on copper: Empirical and semiempirical relations

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ID: 117200
1994
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Reference Key
maneira1994journalplanar Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors M. L. Escrivão,A. M. C. Moutinho,M. J. P. Maneira;M. L. Escrivão;A. M. C. Moutinho;M. J. P. Maneira;
Journal journal of vacuum science & technology a
Year 1994
DOI
10.1116/1.578813
URL
https://sciprofiles.com/publication/view/a8ddc0a0ea1566a2b15cae20f4f035d0
Keywords
copper planar magnetron semiempirical magnetron glow discharge

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