magnetron glow discharge

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Planar magnetron glow discharge on copper: Empirical and semiempirical relations
M. L. Escrivão,A. M. C. Moutinho,M. J. P. Maneira;M. L. Escrivão;A. M. C. Moutinho;M. J. P. Maneir...
1994 journal of vacuum science & technology a DOI: 10.1116/1.578813 166 views

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copper planar magnetron semiempirical