emitter arrays

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1
Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process
Jin Ho Lee;Jin Ho Lee;
1998 journal of vacuum science & technology b: microele... DOI: 10.1116/1.589911 160 views
2
Fabrication and characterization of silicon field emitter arrays by spin-on-glass etch-back process
Jin Ho Lee;Jin Ho Lee;
1998 journal of vacuum science & technology b: microele... DOI: 10.1116/1.589786 139 views
3
Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature
Jin Ho Lee;Jin Ho Lee;
1998 journal of vacuum science & technology b: microele... DOI: 10.1116/1.589902 157 views

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polishing process focusing electrode silicon field mechanical polishing field emitter chemical mechanical glass etch fabrication and characterization polycrystalline silicon low temperature silicidation sharpening