spectroscopic study of plasma polymerized a-c:h films deposited by a dielectric barrier discharge
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2016
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Abstract
Plasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C2Hm/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection absorption spectroscopy (FT-IRRAS), Raman spectroscopy, and ellipsometry. FT-IRRAS revealed the presence of sp3 and sp2 C–H stretching and C–H bending vibrations of bonds in the films. The presence of D and G bands was confirmed by Raman spectroscopy. Thin films obtained from C2H4/Ar and C2H6/Ar gas mixtures have ID/IG ratios of 0.45 and 0.3, respectively. The refractive indices were 2.8 and 3.1 for C2H4/Ar and C2H6/Ar films, respectively, at a photon energy of 2 eV.
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chandrashekaraiah2016materialsspectroscopic
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| Authors | ;Thejaswini Halethimmanahally Chandrashekaraiah;Robert Bogdanowicz;Eckart Rühl;Vladimir Danilov;Jürgen Meichsner;Steffen Thierbach;Rainer Hippler |
| Journal | Nature Materials |
| Year | 2016 |
| DOI |
10.3390/ma9070594
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