study of thermal electrical modified etching for glass and its application in structure etching
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ID: 189086
2017
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Abstract
In this work, an accelerating etching method for glass named thermal electrical modified etching (TEM etching) is investigated. Based on the identification of the effect in anodic bonding, a novel method for glass structure micromachining is proposed using TEM etching. To validate the method, TEM-etched glasses are prepared and their morphology is tested, revealing the feasibility of the new method for micro/nano structure micromachining. Furthermore, two kinds of edge effect in the TEM and etching processes are analyzed. Additionally, a parameter study of TEM etching involving transferred charge, applied pressure, and etching roughness is conducted to evaluate this method. The study shows that TEM etching is a promising manufacture method for glass with low process temperature, three-dimensional self-control ability, and low equipment requirement.
| Reference Key |
zhan2017materialsstudy
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|---|---|
| Authors | ;Zhan Zhan;Wei Li;Lingke Yu;Lingyun Wang;Daoheng Sun |
| Journal | Nature Materials |
| Year | 2017 |
| DOI |
10.3390/ma10020158
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