reduced subthreshold characteristics and flicker noise of an algaas/ingaas phemt using liquid phase deposited tio2 as a gate dielectric

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ID: 159709
2016
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Abstract
This study presents the fabrication and improved properties of an AlGaAs/InGaAs metal-oxide-semiconductor pseudomorphic high-electron-mobility transistor (MOS-PHEMT) using liquid phase deposited titanium dioxide (LPD-TiO2) as a gate dielectric. Sulfur pretreatment and postoxidation rapid thermal annealing (RTA) were consecutively employed before and after the gate dielectric was deposited to fill dangling bonds and therefore release interface trapped charges. Compared with a benchmark PHEMT, the AlGaAs/InGaAs MOS-PHEMT using LPD-TiO2 exhibited larger gate bias operation, higher breakdown voltage, suppressed subthreshold characteristics, and reduced flicker noise. As a result, the device with proposed process and using LPD-TiO2 as a gate dielectric is promising for high-speed applications that demand little noise at low frequencies.
Reference Key
lam2016materialsreduced Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors ;Kai-Yuen Lam;Jung-Sheng Huang;Yong-Jie Zou;Kuan-Wei Lee;Yeong-Her Wang
Journal Nature Materials
Year 2016
DOI
10.3390/ma9110861
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