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1
Role of the Plasma Activation Degree on Densification of Organosilicon Films
Rangel RCC;Cruz NC;Rangel EC;;
2019 Materials (Basel, Switzerland) 103 views
2
Role of the Plasma Activation Degree on Densification of Organosilicon Films
Rita C. C. Rangel;Nilson C. Cruz;Elidiane C. Rangel;Rangel, Rita C. C.;Cruz, Nilson C.;Rangel,...
2019 Materials (Basel, Switzerland) DOI: 10.3390/ma13010025 128 views

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National Center for Biotechnology Information NCBI NLM MEDLINE pubmed abstract nih national institutes of health national library of medicine pmc6981977 doi:10.3390/ma13010025 rita c c rangel nilson c cruz elidiane c rangel PECVD sioxcyhz hmdso densification organosilicon corrosion barrier