scaln thin films

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Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Florian Bartoli;Jérémy Streque;Jaafar Ghanbaja;Philippe Pigeat;Pascal Boulet;Sami Hage-Ali;Natalya N...

2020 sensors DOI: 10.3390/s20164630 166 views

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sputtering hetero-epitaxial films saw sensors