plasma regime

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Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films

Hugo Águas,Rodrigo Martins,Yuri Nunes,Manuel J.P. Maneira,Elvira Fortunato;Hugo Águas;Rodrigo Martin...

2001 materials science forum DOI: 10.4028/www.scientif... 199 views

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thin films optical morphological properties