charge leakage
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mems
electric field sensor
electric field attenuation
water film thickness
National Center for Biotechnology Information
NCBI
NLM
MEDLINE
pubmed abstract
nih
national institutes of health
national library of medicine
pmid:22666077
pmc3355460
doi:10.3390/s120405105
haiyan zhang
dongming fang
shanhong xia