Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors

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ID: 110621
2012
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Abstract
The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
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Authors Haiyan Zhang;Dongming Fang;Pengfei Yang;Chunrong Peng;Xiaolong Wen;Shanhong Xia;Zhang, Haiyan;Fang, Dongming;Yang, Pengfei;Peng, Chunrong;Wen, Xiaolong;Xia, Shanhong;
Journal sensors
Year 2012
DOI
10.3390/s120405105
URL
https://www.mdpi.com/1424-8220/12/4/5105/htm##versions-div
Keywords
mems electric field sensor charge leakage electric field attenuation water film thickness National Center for Biotechnology Information NCBI NLM MEDLINE pubmed abstract nih national institutes of health national library of medicine pmid:22666077 pmc3355460 doi:10.3390/s120405105 haiyan zhang dongming fang shanhong xia

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