silicon resonant accelerometer

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A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor.

Cui, Jian;Yang, Haibing;Li, Dong;Song, Ziyang;Zhao, Qiancheng;

2019 micromachines DOI: E571 219 views

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micromachines

ISSN: 2072-666X 1,660 views

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isolation frame stress insensitive anchor temperature-induced stress