hemispherical shell resonators

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The Recent Progress of MEMS/NEMS Resonators

Lei Wei;Xuebao Kuai;Yidi Bao;Jiangtao Wei;Liangliang Yang;Peishuai Song;Mingliang Zhang;Fuhua Yang;X...

2021 micromachines DOI: 10.3390/mi12060724 178 views

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mems/nems single/double-clamped resonators ring/microdisk resonators saw/baw resonators