The Recent Progress of MEMS/NEMS Resonators

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ID: 272927
2021
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Abstract
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.
Reference Key
wei2021micromachinesthe Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Lei Wei;Xuebao Kuai;Yidi Bao;Jiangtao Wei;Liangliang Yang;Peishuai Song;Mingliang Zhang;Fuhua Yang;Xiaodong Wang;Wei, Lei;Kuai, Xuebao;Bao, Yidi;Wei, Jiangtao;Yang, Liangliang;Song, Peishuai;Zhang, Mingliang;Yang, Fuhua;Wang, Xiaodong;
Journal micromachines
Year 2021
DOI
10.3390/mi12060724
URL
https://doi.org/10.3390/mi12060724
Keywords
mems/nems single/double-clamped resonators hemispherical shell resonators ring/microdisk resonators saw/baw resonators

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