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High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers

A. Hemmi,C. Bernard,H. Cun,S. Roth,M. Klöckner,T. Kalin,M. Weinl,S. Gsell,Matthias Schreck,J. Osterw...

2014 review of scientific instruments DOI: 10.1063/1.4866648 195 views

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chemical vapour deposition atomic layer deposition annealing boron compounds high-temperature effects iii-v semiconductors low energy electron diffraction plasma materials processing scanning tunnelling microscopy semiconductor growth semiconductor thin films surface cleaning wide band gap semiconductors x-ray photoelectron spectra