nano-platesmechanical engineering and machinery

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a simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes
;Liviu eNicu;Liviu eNicu;Thierry eLeichle;Thierry eLeichle;Seok eKim;Bernard eLegrand;Bernard eLegra...
2016 bmc genetics DOI: 10.3389/fmech.2016.0... 164 views

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resonators