a simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes
Clicks: 242
ID: 207966
2016
Article Quality & Performance Metrics
Overall Quality
Not rated
Combines reader engagement with the AI quality analysis. This
article has not been analysed, so there is no overall score —
reader engagement is measured and shown alongside.
Reader Engagement
Steady Performance
30.0
/100
242 views
57 readers
AI Quality Assessment
Not analyzed
Readership in this journal
SteadyRanked #15 of 18 articles by views in bmc genetics
Most read
Least read
Bar heights use a square-root scale.
Mint this article as an NFT
Not yet mintedCreate a permanent, verifiable on-chain record of this article on the Scimatic Network. The NFT is held in your Journament account, and you can withdraw it to your own wallet at any time.
5
SUSD
one-off · no wallet required
Abstract
In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer-printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air. Because the cavities used for electrostatic actuation/sensing of the devices are tight sealed, nanoplates fabricated via micro-masonry are suitable for liquid environment operation and are thus a promising solution for biosensing applications.
| Reference Key |
enicu2016frontiersa
Use this key to autocite in the manuscript while using
SciMatic Manuscript Manager or Thesis Manager
|
|---|---|
| Authors | ;Liviu eNicu;Liviu eNicu;Thierry eLeichle;Thierry eLeichle;Seok eKim;Bernard eLegrand;Bernard eLegrand;Fabrice eMathieu;Fabrice eMathieu;Hohyun eKeum;Adhitya eBhaswara;Adhitya eBhaswara |
| Journal | bmc genetics |
| Year | 2016 |
| DOI |
10.3389/fmech.2016.00001
|
| URL | |
| Keywords |
Citations
No citations found. To add a citation, contact the admin at info@scimatic.org
Comments
No comments yet. Be the first to comment on this article.