polysilicon

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Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

Aldo Ghisi;Stefano Mariani;Alberto Corigliano;Sarah Zerbini;Ghisi, Aldo;Mariani, Stefano;Corigliano,...

2012 sensors DOI: 10.3390/s121013985 219 views

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mems inertial sensors reduced order modelling shocks and drops