Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

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ID: 115602
2012
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Abstract
In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor is adopted. The capability and the accuracy of the model are assessed against three-dimensional finite element simulations, and against outcomes of experiments on instrumented samples. It is shown that the reduced order model provides accurate outcomes as for the system dynamics. To also get rather accurate results in terms of stress fields within regions that are prone to fail upon high-g shocks, a correction factor is proposed by accounting for the local stress amplification induced by re-entrant corners.
Reference Key
ghisi2012sensorsphysically-based Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Aldo Ghisi;Stefano Mariani;Alberto Corigliano;Sarah Zerbini;Ghisi, Aldo;Mariani, Stefano;Corigliano, Alberto;Zerbini, Sarah;
Journal sensors
Year 2012
DOI
10.3390/s121013985
URL
https://www.mdpi.com/1424-8220/12/10/13985/htm
Keywords
mems inertial sensors reduced order modelling shocks and drops polysilicon

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