Nano-opto-electro-mechanical switches operated at CMOS-level voltages.

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ID: 71426
2019
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Abstract
Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning.
Reference Key
haffner2019nanooptoelectromechanicalscience Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Haffner, Christian;Joerg, Andreas;Doderer, Michael;Mayor, Felix;Chelladurai, Daniel;Fedoryshyn, Yuriy;Roman, Cosmin Ioan;Mazur, Mikael;Burla, Maurizio;Lezec, Henri J;Aksyuk, Vladimir A;Leuthold, Juerg;
Journal science (new york, ny)
Year 2019
DOI
10.1126/science.aay8645
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Keywords
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