Deconstructing energy use in microelectronics manufacturing: An experimental case study of a MEMS fabrication facility

Clicks: 219
ID: 66529
2010
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branham2010deconstructingenvironmental Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Branham, M.
Journal environmental science and technology
Year 2010
DOI
10.1021/es902388b
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