Scalable Fabrication of 12-inch Polycrystalline Diamond Membranes

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ID: 332499
2026
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Abstract
Scalable fabrication protocol produces 12-inch polycrystalline diamond membranes via microwave plasma chemical vapor deposition for advanced thermal management.
Reference Key
openalex_W7222264428 Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Xiaoyu Yang, Haonan Li, Zhongqiang Wang, Yang He, 薛生杰, 梁智文, Liangwei Lin, Tao Wang, Ding Wang, Ping Wang, Huarui Sun, Qi Wang, Xinqiang Wang
Journal national science review
Year 2026
DOI
10.1093/nsr/nwag645
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