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Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates.
Ben Messaoud, Jaweb;Michaud, Jean-François;Certon, Dominique;Camarda, Massimo;Piluso, Nicolò;Colin,...
2019 micromachines DOI: E801 259 views
2
The CORE Group Polio Project: An Overview of Its History and Its Contributions to the Global Polio Eradication Initiative.
Losey, Lee;Ogden, Ellyn;Bisrat, Filimona;Solomon, Roma;Newberry, David;Coates, Ellen;Ward, Dora;Hilm...
2019 The American journal of tropical medicine and hygi... DOI: 10.4269/ajtmh.18-091... 238 views

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mechanical properties residual stress young’s modulus 4h-sic fem bulk micromachining circular membrane electrochemical etching vibrometry