deep etching capability

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Fabrication of micro pits based on megasonic assisted through-mask electrochemical micromachining.
Zhai, Ke;Du, Liqun;Wen, Yikui;Wang, Shuxuan;Cao, Qiang;Zhang, Xi;Liu, Junshan;
2019 ultrasonics DOI: S0041-624X(19)30299-... 246 views

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ultrasonics
ISSN: 1874-9968 562 views

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electrolytic conductivity etching factor megasonic micro pit through-mask electrochemical micromachining