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Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation

D. Lehninger; R. Olivo; T. Ali; M. Lederer; T. Kämpfe; C. Mart; K. Biedermann; K. Kühnel; L. Roy; Ma...

2020 physica status solidi (a) DOI: 10.1002/pssa.2019008... 18 views

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ferroelectric formation hafnium compatible oxide furnace back‐end‐of‐line anneal zirconium