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Chloride-based CVD growth of silicon carbide for electronic applications

Pedersen H;Leone S;Kordina O;Henry A;Nishizawa S;Koshka Y;Janzén E;;

2012 chemical reviews 185 views

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National Center for Biotechnology Information NCBI NLM MEDLINE pubmed abstract nih national institutes of health national library of medicine doi:10.1021/cr200257z henrik pedersen stefano leone erik janzén