silicon rim microstructures

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Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
Myeong-Su Ahn;Jaehun Jeon;Kyung-Won Jang;Ki-Hun Jeong;Ahn, Myeong-Su;Jeon, Jaehun;Jang, Kyung-Won;Je...
2021 micromachines DOI: 10.3390/mi12070754 104 views

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large-area and ultrathin mems mirror bimorph thermal actuator statically actuated mems mirror