micro-electro-mechanical system (mems) mirror

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A Customized Two Photon Fluorescence Imaging Probe Based on 2D scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators

Hussein Mehidine;Min Li;Jean-Francois Lendresse;Francoise Bouvet;Huikai Xie;Darine Abi Haidar;Mehidi...

2020 micromachines DOI: 10.3390/mi11070704 180 views

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two-photon imaging electrothermal actuators 2d scanning probe