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A novel process for plasma immersion ion implantation and deposition with ions from vaporization of solid targets

Rogerio Oliveira,M. Ueda,B. Moreno,L. Hoshida,S. Oswald,E. Abramof;Rogerio Oliveira;M. Ueda;B. Moren...

2008 physica status solidi (c) DOI: 10.1002/pssc.2007783... 115 views

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52.77.dq 61.05.cp 78.30.er 82.80.pv