out-of-plane

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charge pumped mems actuation for high force and large displacement
;Ian R. HARVEY;Brian W. BAKER;Ronald BOUTTE; Alex L. HOGAN;Kurtis R. FORD
2014 gülhane tıp dergi 197 views

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Data in brief
ISSN: 2352-3409 1,080 views

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Technology (General) mems actuator energy harvesting