tunable sensitivity

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design, manufacture and testing of capacitive pressure sensors for low-pressure measurement ranges

;Vasileios Mitrakos;Lisa Macintyre;Fiona C. Denison;Philip J.W. Hands;Marc P.Y. Desmulliez

2017 chemistryopen DOI: 10.3390/mi8020041 152 views

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Mechanical engineering and machinery pressure sensor