resonant gas sensor

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A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems

Inug Yoon;Gayoung Eom;Sungwoo Lee;Bo Kyeong Kim;Sang Kyung Kim;Hyunjoo J. Lee;Yoon, Inug;Eom, Gay...

2019 sensors DOI: 10.3390/s19061401 195 views

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selectivity multiplex detection voc cmut