Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography.

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ID: 99804
2020
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Abstract
We demonstrate that ion-beam lithography can be applied to the fabrication of rotationally parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high-resolution X-ray focusing and microscopy. Three single half-lenses with curvature radii of 4.8 µm were produced and stacked to form a compound refractive lens, which provided diffraction-limited focusing of X-ray radiation at the P14 beamline of PETRA-III (DESY). As shown with SEM, the lenses are free of expressed low- and high-frequency shape modulations with a figure error of < 200 nm and surface roughness of 30 nm. Precise micro-manipulation and stacking of individual lenses are demonstrated, which opens up new opportunities for compact X-ray microscopy with nanometer resolution.
Reference Key
medvedskaya2020diamondoptics Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Polina Medvedskaya, Ivan Lyatun, Sergey Shevyrtalov, Maxim Polikarpov, Irina Snigireva, Vyacheslav Yunkin, Anatoly Snigirev
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Journal Optics express
Year 2020
DOI
10.1364/OE.384647
URL
Keywords
crystfel indexing pink x-ray beam pinkindexer serial electron diffraction

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