Thermodynamics of the production of condensed phases in the chemical vapor deposition process of zirconium diboride with ZrCl 4-BCl 3-H 2 precursors

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ID: 93367
2012
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deng2012thermodynamicsthin Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Deng, J.
Journal thin solid films
Year 2012
DOI
10.1016/j.tsf.2011.10.004
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