High-Efficiency and Low-Damage Lapping Process Optimization.

تحسين عملية الصقل عالية الكفاءة ومنخفضة الضرر.

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ID: 88223
2020
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Abstract
The silica opticsare widely applied in the modern laser system, and its fabrication is always the research focus. In the manufacturing process, the lapping process occurs between grinding and final polishing. However, lapping processes optimizations focus on decreasing the depth of sub-surface damage (SSD) or improving lapping efficiency individually. So, the optimum balance point between efficiency and damageshould be studied further. This manuscript establishes the effective removal rate of damage (ERRD)model, and the relationship between the ERRD and processing parameters is simulated. Then, high-efficiency, low-damage lapping processing routine is established based on the simulation. The correctness and feasibility are validated. In this work, the optimized method is confirmed that it can improve efficiency and decrease damage layer depth in the lapping process which promotes the development of optics in low-damage fabrication.
تُستخدم بصريات السيليكا على نطاق واسع في أنظمة الليزر الحديثة، ويظل تصنيعها دائماً محوراً رئيساً للأبحاث. وفي سياق عملية التصنيع، تقع عملية التنعيم (lapping) بين مرحلتي التجليخ والصقل النهائي. ومع ذلك، ينصبّ تركيز عمليات تحسين التنعيم على تقليل عمق الضرر تحت السطحي (SSD) أو تعزيز كفاءة التنعيم، كلاً على حدة؛ لذا، ينبغي دراسة نقطة التوازن المثلى بين الكفاءة والضرر بمزيد من التفصيل. يُرسي هذا البحث نموذجاً لـ "معدل الإزالة الفعّال للضرر" (ERRD)، وتتم محاكاة العلاقة بين هذا المعدل ومعلمات المعالجة. ومن ثمّ، استُحدث مسار تشغيلي لمعالجة التنعيم ذو كفاءة عالية وضرر منخفض استناداً إلى تلك المحاكاة، وتم التحقق من صحته وجدواه. وفي هذا العمل، تأكدت قدرة المنهجية المُحسَّنة على تعزيز الكفاءة وتقليص عمق طبقة الضرر في عملية التنعيم، مما يسهم في تطوير تقنيات تصنيع البصريات منخفضة التلف.
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song2020highefficiencymaterials Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Ci Song, Feng Shi, Wanli Zhang, Zhifan Lin, Yuxuan Lin
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Journal Materials (Basel, Switzerland)
Year 2020
DOI
E569
URL
Keywords
effective removal rate of damage lapping process low-damage fabrication sub-surface damage

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