Metalorganic vapour-phase epitaxy of AlGaN/GaN heterostructures on chlorine plasma etched GaN templates without buried conductive layer

Clicks: 196
ID: 78427
2020
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woko2020metalorganicmaterials Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Wośko, M.
Journal Materials Science in Semiconductor Processing
Year 2020
DOI
10.1016/j.mssp.2019.104816
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