Pinch-off plasma CVD deposition process and material technology for nano-device air gap/spacer formation

Clicks: 195
ID: 76768
2018
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nguyen2018pinchoffecs Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Nguyen, S.
Journal ecs transactions
Year 2018
DOI
10.1149/08506.0025ecst
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