One-Dimensional Edge Contacts to a Monolayer Semiconductor.

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ID: 66563
2019
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Abstract
Integration of electrical contacts into van der Waals (vdW) heterostructures is critical for realizing electronic and optoelectronic functionalities. However, to date no scalable methodology for gaining electrical access to buried monolayer two-dimensional (2D) semiconductors exists. Here we report viable edge contact formation to hexagonal boron nitride (hBN) encapsulated monolayer MoS. By combining reactive ion etching, in situ Ar sputtering and annealing, we achieve a relatively low edge contact resistance, high mobility (up to ∼30 cm V s) and high on-current density (>50 μA/μm at = 3V), comparable to top contacts. Furthermore, the atomically smooth hBN environment also preserves the intrinsic MoS channel quality during fabrication, leading to a steep subthreshold swing of 116 mV/dec with a negligible hysteresis. Hence, edge contacts are highly promising for large-scale practical implementation of encapsulated heterostructure devices, especially those involving air sensitive materials, and can be arbitrarily narrow, which opens the door to further shrinkage of 2D device footprint.
Reference Key
jain2019onedimensionalnano Use this key to autocite in the manuscript while using SciMatic Manuscript Manager or Thesis Manager
Authors Jain, Achint;Szabó, Áron;Parzefall, Markus;Bonvin, Eric;Taniguchi, Takashi;Watanabe, Kenji;Bharadwaj, Palash;Luisier, Mathieu;Novotny, Lukas;
Journal Nano letters
Year 2019
DOI
10.1021/acs.nanolett.9b02166
URL
Keywords
encapsulation 2d materials tmdcs edge contacts heterostructures

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