Single mask fabrication process of vacuum microelectronics components and preliminary characterization results
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ID: 66535
2005
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| Reference Key |
phommahaxay2005singletechnical
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|---|---|
| Authors | Phommahaxay, A. |
| Journal | technical digest of the 18th international vacuum nanoelectronics conference, ivnc 2005 |
| Year | 2005 |
| DOI |
10.1109/IVNC.2005.1619639
|
| URL | |
| Keywords | Keywords not found |
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