Modeling of low pressure plasma sources for microelectronics fabrication
Clicks: 213
ID: 66519
2017
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| Reference Key |
agarwal2017modelingjournal
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|---|---|
| Authors | Agarwal, A. |
| Journal | journal of physics d: applied physics |
| Year | 2017 |
| DOI |
10.1088/1361-6463/aa88f0
|
| URL | |
| Keywords | Keywords not found |
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